Prof. Shuming Yang, Xi’an Jiaotong University, China

Title

Investigation of measurement methods for nano-scale structured surface

Abstract

Optical measurement at nano scale is becoming even more important with the ultra-precision manufacturing and the nano fabrication getting further development. Super-smooth surfaces and structure surfaces at nano scale are widely used to build nano devices and systems. However, the current measurement methods are challenged if surface roughness and the key dimension is down to critical size, and depth-to-width ratio is larger than the length of probe or light cannot reach. This talk will discuss the optical measurement methods developed for the structured surfaces when the feature size is less than half wavelength, and with a large depth-to-width ratio.

Biography

Shuming Yang, is currently a full professor at School of Mechanical Engineering, Xi’an Jiaotong University (XJTU), China. He achieved his BSc and MSc in mechanical engineering from XJTU, and Ph.D. in nanotechnology and instrumentation from University of Huddersfield (UoH) of the UK. He then started to work at UoH, after that he joined in XJTU till now. His research areas include micro-/nano-fabrication and measurement, optical technology and instrumentation, precision/ultra-precision manufacturing etc. He has held more than 20 research projects including National Key R&D Program of China, National Science and Technology Major Projects etc. He has published more than 120 academic papers and owned 40 patents of PCT, UK, European and China. He achieved the first class of Science and Technology Progress Award from the Ministry of Education, the first class of Machinery Industry Science and Technology Award of China, the first class of Shaanxi Science and Technology Award, and the second class of Science and Technology Progress Award from the Chinese Society for measurement (CSM) etc. He was elected as a fellow of the International Society for Nanomanufacturing (ISNM). He is also an associate editor of Journal of Manufacturing Systems, an editor of Nanomanufacturing and Nanometrology, a guest editor of Measurement Science and Technology, and a guest editor of the International Journal of Advanced Manufacturing Technology etc.